One piece of terminal opening portion 49 is formed in each of the one pair of rear piezoelectric-side terminal forming portions 43 of the base portion-insulating layer 38 and each of the one pair of front piezoelectric-side terminal forming portions 44 of the stage insulating layer 39. The terminal opening portions 49 are formed so as to pass through the rear piezoelectric-side terminal forming portions 43 and the front piezoelectric-side terminal forming portions 44 in the thickness direction in generally rectangular shapes.

As shown in FIG. 2, the bridged portion 36 includes one pair of curved portions 52 connecting the front ends of the one pair of outrigger portions 17 to both ends in the widthwise direction of the stage 22 in curved shapes and an E-shaped portion 53 connecting the front ends of the one pair of outrigger portions 17 to the front end of the stage 22.

The curved portions 52 extend from the front ends of the outrigger portions 17 toward obliquely inner front side in the widthwise direction in curved shapes to reach both ends in the widthwise direction of the stage 22.

The E-shaped portion 53 has a generally E-shape in plan view. To be specific, the E-shaped portion 53 extends forwardly from the front ends of both of the outrigger portions 17; thereafter, bends inwardly in the widthwise direction; extends inwardly in the widthwise direction to be unified; and then, bends rearwardly to reach the center in the widthwise direction of the front end of the stage 22.

The second base insulating layer 27 is formed of the same insulating material as that of the first base insulating layer 26.