The thickness of the second base insulating layer 27 with respect to 100% of the thickness of the first base insulating layer 26 is, for example, 20% or more, or preferably 40% or more and, for example, 500% or less, or preferably 300% or less. To be specific, the second base insulating layer 27 has a thickness of, for example, 1 μm or more, or preferably 3 μm or more and, for example, 30 μm or less, or preferably 15 μm or less.

In the base insulating layer 9, a region where the first terminal region-insulating layer 28 and the second terminal region-insulating layer 54 are formed is defined as a terminal region 62. When projected in the thickness direction, a region that is not overlapped with the terminal region 62, that is, the entire region other than the terminal region 62 in the base insulating layer 9 (the region where the second circumferential region-insulating layer 55 is formed) is defined as a circumferential region 63.

As shown in FIG. 1, the conductor layer 10 includes the external terminals 57, the head-side terminals 58 as one example of the connecting terminal, the piezoelectric-side terminals 59, and the wires 60.

The plurality (six pieces) of external terminals 57 are disposed at the rear end portion of the main body portion-insulating layer 31 corresponding to the main body portion 13. The external terminals 57 include signal terminals 57A and power source terminals 571.