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MTP memory for SOI process

專利號
US10096602B1
公開日期
2018-10-09
申請人
GLOBALFOUNDRIES Singapore Pte. Ltd.(SG Singapore)
發(fā)明人
Shyue Seng Jason Tan; Kiok Boone Elgin Quek
IPC分類
H01L27/06; H01L27/105; H01L29/423; H01L29/788; H01L27/12; H01L29/78; H01L29/66; H01L21/84
技術(shù)領(lǐng)域
gate,region,capacitor,substrate,doped,regions,transistor,dopants,cell,memory
地域: Singapore

摘要

Embodiments of a multi-time programmable (MTP) structure for non-volatile memory cells are presented. The memory cell includes an ultra-thin silicon-on-insulator (SOI) substrate. A transistor having a floating gate is disposed on the SOI substrate. The transistor comprises first and second source/drain (S/D) regions disposed adjacent to sides of the floating gate. A control capacitor having a control gate is disposed on the SOI substrate. The control gate is directly coupled to the floating gate. A device well is disposed in the base substrate and underlaps the floating gate and the control gate. A capacitor back-gate is embedded within the base substrate and in electrical communication with the control gate. A contact region is disposed within the device well.

說明書

In another embodiment, a non-volatile MTP memory cell is disclosed. The memory cell includes an ultra-thin silicon-on-insulator (SOI) substrate. The SOI substrate includes a very thin buried oxide (BOX) layer disposed between a base substrate and a very thin body substrate layer. The memory cell includes a transistor having a floating gate disposed on the SOI substrate. The transistor includes first and second source/drain (S/D) regions disposed in the body substrate layer and adjacent to sides of the floating gate. The memory cell includes a control capacitor having a control gate disposed on the SOI substrate. The control gate is directly coupled to the floating gate. A device well is disposed in the base substrate and underlaps the floating gate and control gate. A first portion of the device well defines a capacitor back-gate embedded within the base substrate. First and second doped regions are disposed between the control gate and capacitor back-gate. The capacitor back-gate is in electrical communication with the control gate. A contact region disposed within the device well.

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