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Modified tungsten silicon

專利號(hào)
US10096609B2
公開(kāi)日期
2018-10-09
申請(qǐng)人
GLOBALFOUNDRIES INC.(KY Grand Cayman)
發(fā)明人
Nicolas L. Breil; Domingo A. Ferrer; Keith Kwong Hon Wong
IPC分類
H01L23/525; H01L27/112; H01L23/522; H01L23/532; H01L21/768
技術(shù)領(lǐng)域
tungsten,mx,silicon,tetragonal,layer,conductive,may,fuse,deposition,be
地域: Grand Cayman

摘要

A method for forming a precision resistor or an e-fuse structure where tungsten silicon is used. The tungsten silicon layer is modified by changing the crystalline structure to a tetragonal tungsten silicon layer.

說(shuō)明書(shū)

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Exemplary embodiments now will be described more fully herein with reference to the accompanying drawings, in which exemplary embodiments are shown. This disclosure may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that this disclosure will be thorough and complete and will fully convey the scope of this disclosure to those skilled in the art. In the description, details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the presented embodiments.

For purposes of the description hereinafter, terms such as “upper”, “l(fā)ower”, “right”, “l(fā)eft”, “vertical”, “horizontal”, “top”, “bottom”, and derivatives thereof shall relate to the disclosed structures and methods, as oriented in the drawing figures. Terms such as “above”, “overlying”, “atop”, “on top”, “positioned on” or “positioned atop” mean that a first element, such as a first structure, is present on a second element, such as a second structure, wherein intervening elements, such as an interface structure may be present between the first element and the second element. The term “direct contact” means that a first element, such as a first structure, and a second element, such as a second structure, are connected without any intermediary conducting, insulating or semiconductor layers at the interface of the two elements.

權(quán)利要求

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