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Enhanced substrate contact for MOS transistor in an SOI substrate, in particular an FDSOI substrate

專利號
US10096708B2
公開日期
2018-10-09
申請人
STMicroelectronics SA(FR Montrouge)
發(fā)明人
Sotirios Athanasiou; Philippe Galy
IPC分類
H01L29/78; H01L27/12; H01L23/528; H01L21/84; H01L29/66; H01L21/74; H01L29/786
技術(shù)領(lǐng)域
forked,transistor,substrate,gate,region,raised,drain,tr,contact,mos
地域: Montrouge

摘要

An integrated electronic device includes a semiconductive film above a buried insulating layer that is situated above a supporting substrate. An active zone is delimited within the semiconductive film. A MOS transistor supported within the active zone includes a gate region situated above the active zone. The gate region includes a rectilinear part situated between source and drain regions. The gate region further includes a forked part extending from the rectilinear part. A raised semiconductive region situated above the active zone is positioned at least partly between portions of the forked part. A substrate contact for the transistor is electrically coupled to the raised semiconductive region.

說明書

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U.S. application patent Ser. No. 15/041,593 filed Feb. 11, 2016 (corresponding to French Application for Patent No. 1556515), incorporated by reference, describes means that make it possible to produce a substrate contact by the use of additional junction-free transistor(s) as connection element(s). Although satisfactory, this solution can however, in some cases, generate spurious effects and offers an integration density which can prove limited in certain applications.

SUMMARY

Thus, according to one implementation and embodiment, it is proposed to provide a substrate contact for a transistor produced in a substrate of SOI type, in particular of FDSOI type, resulting in reduced spurious effects, notably because of a more compact geometry.

According to one aspect, there is proposed a method for producing at least one substrate contact for an MOS transistor produced in and on an active zone of a substrate of silicon on insulator type, comprising:

    • formation on top of the active zone of a gate region of the transistor having a rectilinear part situated between the source and drain regions of the transistor and extended by at least one first forked part,
    • formation of at least one first raised semiconductive region above the active zone and at least partly within said first forked part, and
    • formation of said at least one substrate contact electrically coupled to, for example on, said at least one first raised semiconductive region.

權(quán)利要求

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