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Enhanced substrate contact for MOS transistor in an SOI substrate, in particular an FDSOI substrate

專利號
US10096708B2
公開日期
2018-10-09
申請人
STMicroelectronics SA(FR Montrouge)
發(fā)明人
Sotirios Athanasiou; Philippe Galy
IPC分類
H01L29/78; H01L27/12; H01L23/528; H01L21/84; H01L29/66; H01L21/74; H01L29/786
技術(shù)領(lǐng)域
forked,transistor,substrate,gate,region,raised,drain,tr,contact,mos
地域: Montrouge

摘要

An integrated electronic device includes a semiconductive film above a buried insulating layer that is situated above a supporting substrate. An active zone is delimited within the semiconductive film. A MOS transistor supported within the active zone includes a gate region situated above the active zone. The gate region includes a rectilinear part situated between source and drain regions. The gate region further includes a forked part extending from the rectilinear part. A raised semiconductive region situated above the active zone is positioned at least partly between portions of the forked part. A substrate contact for the transistor is electrically coupled to the raised semiconductive region.

說明書

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According to another aspect, an integrated electronic device is proposed that comprises a semiconductive film, for example fully depleted, above a buried insulating layer, which is itself situated above a supporting substrate, an active zone produced within the semiconductive film, at least one first MOS transistor produced in and on the active zone and comprising a gate region produced above the active zone and having a rectilinear part situated between the source and drain regions and extended by at least one first forked part, at least one first raised semiconductive region situated above the active zone and at least partly within said first forked part, and at least one first substrate contact for the first transistor electrically coupled to, for example on, said first raised semiconductive region.

According to one embodiment of this aspect, the gate region comprises a second forked part extending said rectilinear part opposite the first forked part, the device further comprising a second raised semiconductive region situated above the active zone and at least partly within said second forked part, and a second substrate contact for the first transistor electrically coupled to, for example on, said second raised semiconductive region.

Each forked part can comprise an extension extending at right angles on either side of the rectilinear part out of the source and drain regions, a first branch connected to said extension and extending in the extension of the source region and a second branch connected to said extension and extending in the extension of the drain region, and each raised semiconductive region can extend at least partly between the corresponding first branch and second branch.

權(quán)利要求

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