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Enhanced substrate contact for MOS transistor in an SOI substrate, in particular an FDSOI substrate

專利號
US10096708B2
公開日期
2018-10-09
申請人
STMicroelectronics SA(FR Montrouge)
發(fā)明人
Sotirios Athanasiou; Philippe Galy
IPC分類
H01L29/78; H01L27/12; H01L23/528; H01L21/84; H01L29/66; H01L21/74; H01L29/786
技術(shù)領(lǐng)域
forked,transistor,substrate,gate,region,raised,drain,tr,contact,mos
地域: Montrouge

摘要

An integrated electronic device includes a semiconductive film above a buried insulating layer that is situated above a supporting substrate. An active zone is delimited within the semiconductive film. A MOS transistor supported within the active zone includes a gate region situated above the active zone. The gate region includes a rectilinear part situated between source and drain regions. The gate region further includes a forked part extending from the rectilinear part. A raised semiconductive region situated above the active zone is positioned at least partly between portions of the forked part. A substrate contact for the transistor is electrically coupled to the raised semiconductive region.

說明書

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The device DIS comprises a substrate of fully depleted silicon on insulator (FDSOI) type (FDSOI being an acronym well known to those skilled in the art), which comprises a semiconductive film 1 situated above a buried insulating layer 2 (“BOX”, Buried Oxide), which is itself situated above a supporting substrate comprising a semiconductive well 3.

The well is here of P type and comprises an upper zone 30 (in contact with the BOX) of P+ type which forms a rear buried gate making it possible to bias the channel of a transistor TR via the rear face. In this respect, the device DIS further comprises a back gate contact BG making it possible to bias the well 3.

An insulating region 4, of shallow trench insulation (STI) type delimits an active zone ZA in the semiconductive film 1.

The semiconductive film 1 comprises a fully depleted semiconductive material which in practice is an intrinsic material, for example intrinsic silicon of P type, that is to say very weakly doped (1015 atoms·cm?3).

An MOS transistor TR, for example an NMOS transistor, is produced in and on the active zone ZA.

This transistor TR comprises source S and drain D semiconductive regions, doped of N+ type, an insulated gate region G and a channel region 8 adapted to be formed under the gate.

The insulated gate region G comprises a rectilinear part G1 produced above the channel region 8, and a forked part G2 having an extension G20 extending at right angles on either side of the gate line G1.

權(quán)利要求

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