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Enhanced substrate contact for MOS transistor in an SOI substrate, in particular an FDSOI substrate

專利號(hào)
US10096708B2
公開日期
2018-10-09
申請(qǐng)人
STMicroelectronics SA(FR Montrouge)
發(fā)明人
Sotirios Athanasiou; Philippe Galy
IPC分類
H01L29/78; H01L27/12; H01L23/528; H01L21/84; H01L29/66; H01L21/74; H01L29/786
技術(shù)領(lǐng)域
forked,transistor,substrate,gate,region,raised,drain,tr,contact,mos
地域: Montrouge

摘要

An integrated electronic device includes a semiconductive film above a buried insulating layer that is situated above a supporting substrate. An active zone is delimited within the semiconductive film. A MOS transistor supported within the active zone includes a gate region situated above the active zone. The gate region includes a rectilinear part situated between source and drain regions. The gate region further includes a forked part extending from the rectilinear part. A raised semiconductive region situated above the active zone is positioned at least partly between portions of the forked part. A substrate contact for the transistor is electrically coupled to the raised semiconductive region.

說明書

1 2 3 4 5 6 7 8 9 10 11 12

The device DIS therefore comprises the transistor TR situated in and on a substrate of FDSOI type comprising a substrate contact produced simply and accurately by epitaxial rework and siliciding. Thus, the contact is close to the substrate of the transistor which makes it possible to reduce the spurious capacitive effects and the substrate access resistance.

FIG. 4 illustrates a schematic representation of the device from an electrical point of view.

Represented therein are the transistor TR, comprising its drain D, source S and gate G regions, the contacts PCS, PCD, PCG and PCB, and the contact of the well BG.

A capacitor C schematically represents the capacitor formed under the transistor TR by the semiconductive film 1, the insulating layer 2 and the well 3.

The gate contacts situated on each of the branches G21 and G22 are represented by one and the same contact PCG.

Such a device notably makes it possible to obtain a very significant current gain, of the order of 105.

FIG. 5 illustrates an embodiment in which the device DIS comprises a number of analog MOS transistors TR1, TR2 and TR3 similar to that described previously and illustrated in FIGS. 1 to 4.

The three transistors (the number three not being limiting) are produced in and on the same silicon film 1, and their gates are mutually electrically connected via the extension of their respective forked part.

權(quán)利要求

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