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Aspect ratio trapping (ART) for fabricating vertical semiconductor devices

專利號
US10096709B2
公開日期
2018-10-09
申請人
Intel Corporation(US CA Santa Clara)
發(fā)明人
Van H. Le; Benjamin Chu-Kung; Gilbert Dewey; Jack T. Kavalieros; Ravi Pillarisetty; Willy Rachmady; Marko Radosavljevic; Matthew V. Metz; Niloy Mukherjee; Robert S. Chau
IPC分類
H01L29/78; H01L29/423; H01L29/66; H01L29/786; H01L21/8238; H01L29/267; H01L29/08; H01L29/165; H01L29/739
技術(shù)領(lǐng)域
region,drain,source,vertical,channel,in,gate,stack,layer,embodiment
地域: CA CA Santa Clara

摘要

Aspect ratio trapping (ART) approaches for fabricating vertical semiconductor devices and vertical semiconductor devices fabricated there from are described. For example, a semiconductor device includes a substrate with an uppermost surface having a first lattice constant. A first source/drain region is disposed on the uppermost surface of the substrate and has a second, different, lattice constant. A vertical channel region is disposed on the first source/drain region. A second source/drain region is disposed on the vertical channel region. A gate stack is disposed on and completely surrounds a portion of the vertical channel region.

說明書

It is to be appreciated that not all aspects of the processes described above need be practiced to fall within the spirit and scope of embodiments of the present invention. Also, the processes described herein may be used to fabricate one or a plurality of semiconductor devices. The semiconductor devices may be transistors or like devices. For example, in an embodiment, the semiconductor devices are metal-oxide semiconductor (MOS) transistors for logic or memory, or are bipolar transistors. Also, in an embodiment, the semiconductor devices have a three-dimensional architecture, such as a gate-all-around device. One or more embodiments may be particularly useful for fabricating semiconductor devices at a 10 nanometer (10 nm) or smaller technology node. Embodiments herein may be applicable for improving transistor layout density and for mitigating trends toward increases in contact resistance.

FIG. 2 illustrates a computing device 200 in accordance with one implementation of the invention. The computing device 200 houses a board 202. The board 202 may include a number of components, including but not limited to a processor 204 and at least one communication chip 206. The processor 204 is physically and electrically coupled to the board 202. In some implementations the at least one communication chip 206 is also physically and electrically coupled to the board 202. In further implementations, the communication chip 206 is part of the processor 204.

權(quán)利要求

1
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