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Method for manufacturing color micro light-emitting diode array substrate

專利號
US10096740B1
公開日期
2018-10-09
申請人
Shenzhen China Star Optoelectronics Technology Co., Ltd.(CN Shenzhen, Guangdong)
發(fā)明人
Lixuan Chen
IPC分類
H01L33/00; H01L27/15; H01L33/36
技術領域
micro,substrate,led,leds,color,array,electrodes,zone,receiving,pixel
地域: Shenzhen

摘要

The present invention provides a method for manufacturing a color micro LED array substrate, in which a plurality of monochromic micro LED arrays of different colors are formed on a receiving substrate to form a color micro LED array, wherein making of the monochromic micro LED array of each of the colors is conducted in combination with a bonding technique and a laser lift-off technique and metal electrodes are selectively formed on the micro LEDs in a specific zone of the supply substrate so that the micro LEDs in the specific zone can be selectively bonded to the receiving substrate and laser irradiation is selectively made on the micro LEDs in the specific zone to allow the micro LEDs of the specific zone, after the bonding and laser annealing, to separate from the supply substrate to thereby form the monochromic micro LED array on the receiving substrate to realize fabrication of monochromic micro LED arrays of different colors on the receiving substrate, and the method of fabrication is easy to carry out.

說明書

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Specifically, the receiving substrate 20 can be a thin-film transistor (TFT) array substrate so that the receiving substrate 20, after completion of the formation of the monochromic micro LED arrays of all the different colors, is applicable to manufacturing a color micro LED display for color displaying.

The method for manufacturing a color micro LED array substrate of the present invention involves making a plurality of monochromic micro LED arrays of different colors on a receiving substrate 20 to form a color micro LED array, wherein making of the monochromic micro LED array of each of the colors is conducted in combination with a bonding technique and a laser separation technique and metal electrodes 52 are selectively formed on the micro LEDs 41 in a specific zone of the supply substrate 10 so that the micro LEDs 41 in the specific zone can be selectively bonded to the receiving substrate 20 and laser irradiation is selectively made on the micro LEDs 41 in the specific zone to allow the micro LEDs 41 of the specific zone, after the bonding and laser annealing, to separate from the supply substrate 10 to thereby form the monochromic micro LED array on the receiving substrate 20 to realize fabrication of monochromic micro LED arrays of different colors on the receiving substrate 20, and the method of fabrication is easy to carry out.

權利要求

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