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Method for manufacturing color micro light-emitting diode array substrate

專利號(hào)
US10096740B1
公開日期
2018-10-09
申請(qǐng)人
Shenzhen China Star Optoelectronics Technology Co., Ltd.(CN Shenzhen, Guangdong)
發(fā)明人
Lixuan Chen
IPC分類
H01L33/00; H01L27/15; H01L33/36
技術(shù)領(lǐng)域
micro,substrate,led,leds,color,array,electrodes,zone,receiving,pixel
地域: Shenzhen

摘要

The present invention provides a method for manufacturing a color micro LED array substrate, in which a plurality of monochromic micro LED arrays of different colors are formed on a receiving substrate to form a color micro LED array, wherein making of the monochromic micro LED array of each of the colors is conducted in combination with a bonding technique and a laser lift-off technique and metal electrodes are selectively formed on the micro LEDs in a specific zone of the supply substrate so that the micro LEDs in the specific zone can be selectively bonded to the receiving substrate and laser irradiation is selectively made on the micro LEDs in the specific zone to allow the micro LEDs of the specific zone, after the bonding and laser annealing, to separate from the supply substrate to thereby form the monochromic micro LED array on the receiving substrate to realize fabrication of monochromic micro LED arrays of different colors on the receiving substrate, and the method of fabrication is easy to carry out.

說明書

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SUMMARY OF THE INVENTION

An objective of the present invention is to provide a method for manufacturing a color micro light-emitting diode (LED) array substrate, which allows for selective transfer of micro LEDs of supply substrates of different colors to a receiving substrate to form monochromic micro LED arrays of different colors so as to realize fabrication of a color micro LED array substrate.

To achieve the above objective, the present invention provides a method for manufacturing a color micro LED array substrate, wherein the color micro LED array substrate comprises a receiving substrate and a color micro LED array arranged on the receiving substrate; the receiving substrate comprises a plurality of monochromic pixel zones respectively corresponding to different colors, the color micro LED array comprising a plurality of monochromic micro LED arrays of different colors, the monochromic micro LED array of each of the colors being arranged in one of the monochromic pixel zones corresponding to the color;

wherein a process for making the monochromic micro LED array of each color of the color micro LED array substrate comprises the following steps:

Step S1: providing a supply substrate corresponding to a selected color and a receiving substrate, wherein the supply substrate is provided with a plurality of micro LEDs of the selected color; defining a to-be-transferred zone on the supply substrate to correspond to the monochromic pixel zone of the receiving substrate that corresponds to the selected color and defining the micro LEDs located in the to-be-transferred zone of the supply substrate as micro LEDs to be transferred, and forming metal electrodes on each of the micro LEDs to be transferred,

權(quán)利要求

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