白丝美女被狂躁免费视频网站,500av导航大全精品,yw.193.cnc爆乳尤物未满,97se亚洲综合色区,аⅴ天堂中文在线网官网

Laterally grown edge emitting laser

專(zhuān)利號(hào)
US10096975B1
公開(kāi)日期
2018-10-09
申請(qǐng)人
INTERNATIONAL BUSINESS MACHINES CORPORATION(US NY Armonk)
發(fā)明人
Effendi Leobandung; Ning Li
IPC分類(lèi)
H01S5/343; H01S5/30; H01S5/02
技術(shù)領(lǐng)域
layer,iii,doped,cladding,optical,dielectric,may,substrate,structure,silicon
地域: NY NY Armonk

摘要

A laterally grown edge emitting laser is provided. A semiconductor structure is disposed on a substrate. A first, a second and a third III-V optical layers are sequentially and laterally grown on and from a sidewall of the semiconductor structure. A cladding semiconductor layer is disposed next to the third III-V optical layer and electrically connected to the III-V optical layer. Then, a first contact structure and a second contact structure is disposed on and electrically connected to the semiconductor structure and the cladding semiconductor layer, respectively. In the edge emitting laser, each of the first, second and third III-V optical layers may independently include a III-V semiconductor including at least one of group III elements of boron (B), gallium (Ga), aluminum (Al) and indium (In), and at least one of group V elements of nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb) and bismuth (Bi). The laterally grown edge emitting laser may be integrated with a metal-oxide-semiconductor field-effect transistor (MOSFET). A method for manufacturing the laterally grown edge emitting laser is also provided.

說(shuō)明書(shū)

In the edge emitting laser, each of the first, second and third III-V optical layers may independently include a III-V semiconductor which includes at least one of group III elements of boron (B), gallium (Ga), aluminum (Al) and indium (In), and at least one of group V elements of nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb) and bismuth (Bi). The semiconductor structure may include an n-doped semiconductor, the cladding semiconductor layer may include a p-doped semiconductor, the first III-V optical layer may include an n-doped III-V semiconductor, and the third III-V optical layer may include a p-doped III-V semiconductor. The semiconductor structure may include an n-doped silicon, the cladding semiconductor layer may include a p-doped silicon, the first III-V optical layer may include an n-doped AlGaAs, and the third III-V optical layer may include a p-doped AlGaAs. The second III-V optical layer may include a quantum well structure or multiple quantum well structures. The second III-V optical layer may include InGaAs. The first dielectric layer and the second dielectric layer may include silicon oxide. A width of the semiconductor structure in the first direction may be about 0.5 μm to about 2 μm, and a length of the semiconductor structure in the second direction may be about 100 μm to about 8000 μm. A width in the first direction for the first III-V optical layer may be about 20 nm to about 50 nm, for the second III-V optical layer may be about 5 nm to about 10 nm, and for the third III-V optical layer may be about 20 nm to about 50 nm. A width of the cladding semiconductor layer in the first direction may be about 0.5 μm to about 2 μm, and a length of the cladding semiconductor layer in the second direction may be about 100 μm to about 8000 μm. At least one of the first, second and third III-V optical layers may include a multilayer structure. The hard mask layer may include silicon oxide or silicon nitride.

權(quán)利要求

1
微信群二維碼
意見(jiàn)反饋