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Laterally grown edge emitting laser

專利號(hào)
US10096975B1
公開日期
2018-10-09
申請(qǐng)人
INTERNATIONAL BUSINESS MACHINES CORPORATION(US NY Armonk)
發(fā)明人
Effendi Leobandung; Ning Li
IPC分類
H01S5/343; H01S5/30; H01S5/02
技術(shù)領(lǐng)域
layer,iii,doped,cladding,optical,dielectric,may,substrate,structure,silicon
地域: NY NY Armonk

摘要

A laterally grown edge emitting laser is provided. A semiconductor structure is disposed on a substrate. A first, a second and a third III-V optical layers are sequentially and laterally grown on and from a sidewall of the semiconductor structure. A cladding semiconductor layer is disposed next to the third III-V optical layer and electrically connected to the III-V optical layer. Then, a first contact structure and a second contact structure is disposed on and electrically connected to the semiconductor structure and the cladding semiconductor layer, respectively. In the edge emitting laser, each of the first, second and third III-V optical layers may independently include a III-V semiconductor including at least one of group III elements of boron (B), gallium (Ga), aluminum (Al) and indium (In), and at least one of group V elements of nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb) and bismuth (Bi). The laterally grown edge emitting laser may be integrated with a metal-oxide-semiconductor field-effect transistor (MOSFET). A method for manufacturing the laterally grown edge emitting laser is also provided.

說明書

In the method for manufacturing edge emitting lasers, each of the first, second and third III-V optical layers may independently include a III-V semiconductor including at least one of group III elements of boron (B), gallium (Ga), aluminum (Al) and indium (In), and at least one of group V elements of nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb) and bismuth (Bi). The semiconductor structure may include an n-doped silicon, the cladding semiconductor layer may include a p-doped silicon, the first III-V optical layer may include an n-doped AlGaAs, the second III-V optical layer may include InGaAs, and the third III-V optical layer may include a p-doped AlGaAs. The laterally growing of the first III-V optical layer may include selective epitaxial growth of n-doped AlGaAs on n-doped silicon sidewall. The etching of the semiconductor substrate may include etching a silicon substrate about 0.5 μm to about 2 μM deep through a wet etching process with strong alkaline substances including tetramethylammonium hydroxide. The forming of the cladding semiconductor layers may include: depositing an amorphous p-doped silicon cladding layer on the semiconductor substrate; planarizing the amorphous p-doped silicon cladding layer to expose the hard mask layer; etching back to expose the first, second, and third III-V optical layers; and patterning the amorphous p-doped silicon cladding layer to form the cladding semiconductor layers. A width of the semiconductor structure in the first direction may be about 0.5 μm to about 2 μm, and a length of the semiconductor structure in the second direction may be about 100 μM to about 8000 μm. A width in the first direction for the first III-V optical layer may be about 20 nm to about 50 nm, for the second III-V optical layer may be about 5 nm to about 10 nm, and for the third III-V optical layer may be about 20 nm to about 50 nm.

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