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Initialization process for magnetic random access memory (MRAM) production

專利號
US10867651B2
公開日期
2020-12-15
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Yuan-Jen Lee; Guenole Jan; Huanlong Liu; Jian Zhu
IPC分類
G11C11/00; G11C11/16; H01L27/22; H01L43/02; H01L43/08; H01L43/12; H01L43/10
技術(shù)領(lǐng)域
mtj,ap1,ap2,layer,fl,in,syap,pinned,magnetic,ap
地域: Hsinchu

摘要

An initialization process is disclosed for a perpendicular magnetic tunnel junction (p-MTJ) wherein the switching error rate is reduced from a typical range of 30-100 ppm to less than 10 ppm. In one embodiment, an in-plane magnetic field is applied after a final anneal step is performed during memory device fabrication such that all magnetizations in the free layer, and AP1 and AP2 pinned layers are temporarily aligned “in-plane”. After the applied field is removed, interfacial perpendicular magnetic anisotropy (PMA) at a tunnel barrier/AP1 interface induces a single AP1 magnetic domain with a magnetization in a first vertical direction. Interfacial PMA at a FL/tunnel barrier interface affords a single FL domain with magnetization in the first direction or opposite thereto. AP2 magnetization is opposite to the first direction as a result of antiferromagnetic coupling with the AP1 layer. Alternatively, a perpendicular-to-plane magnetic field may be applied for initialization.

說明書

In all of the embodiments disclosed herein, seed layer 11 may be comprised of one or more of NiCr, Ta, Ru, Ti, TaN, Cu, Mg, or other elements or alloys typically employed to promote a smooth and uniform grain structure in overlying p-MTJ layers. Within SyAP layer 15, the AFC layer 13 is preferably Ru with a thickness of 4, 9, or 14 Angstroms to provide optimal AF coupling between AP1 layer 14 and AP2 layer 12. Optionally, Rh or Ir may serve as the AFC layer. Each of the AP1 and AP2 layers may be comprised of one or more of Co, Fe, and Ni, or an alloy thereof with B. In other embodiments, one or both of the AP1 and AP2 layers may be a laminated stack with inherent PMA such as (Co/Ni)n, (CoFe/Ni)n, (Co/NiFe)n, (Co/Pt)n, (Co/Pd)n, or the like where n is the lamination number. Furthermore, a transitional layer such as CoFeB may be inserted between the uppermost layer in the laminated stack and tunnel barrier layer 16 to provide a CoFeB interface with the tunnel barrier thereby enhancing DRR for MTJ 10.

According to one preferred embodiment, non-magnetic spacer 16 is a tunnel barrier layer having a metal oxide composition that is one of MgO, TiOx, AlTiO, MgZnO, Al2O3, ZnO, ZrOx, HfOx, or MgTaO. More preferably, MgO is selected as the tunnel barrier layer because MgO provides the highest magnetoresistive ratio (DRR), especially when sandwiched between two CoFeB layers, for example. In other embodiments, the non-magnetic spacer may be a so-called CCP layer wherein conducting current paths made of a metal are formed in a metal oxide matrix.

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