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Capacitor and method of manufacturing the same

專利號
US10867752B2
公開日期
2020-12-15
申請人
SAMSUNG ELECTRO-MECHANICS CO., LTD.(KR Suwon-si)
發(fā)明人
Hyun Ho Shin; Jeong Hoon Ryou; Dong Sik Yoo; No Il Park; Chang Soo Jang; Young Kyu Park
IPC分類
H01G4/33; H01G4/232; H01G4/248; H01G4/012; H01G4/30; H01G4/12; H01L49/02; H01G4/08
技術(shù)領(lǐng)域
capacitor,layer,electrode,may,structure,first,second,surface,be,in
地域: Suwon-Si

摘要

A capacitor includes a structure including a plurality of openings penetrating from a first surface of the structure to a second surface opposing the first surface; a capacitor layer disposed on the second surface of the structure and in the plurality of the openings and including a dielectric layer, and a first electrode and a second electrode, the dielectric layer interposed between the first electrode and the second electrode; a first connection layer disposed on the first surface of the structure and connected to the first electrode; a second connection layer disposed on the capacitor layer on the second surface and connected to the second electrode of the structure; and first and second terminals disposed on opposite side surfaces of the structure and connected to the first connection layer and the second connection layer, respectively.

說明書

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In the capacitor according to an exemplary embodiment in the present disclosure, the porous structure which may be formed by anodic aluminum oxide (AAO) is used, the capacitor layer of the MIM structure is deposited, and the electrodes of the capacitor layer are then connected to the terminals on the opposite side surface of the porous structure. Since the capacitor layer is formed in the plurality of openings, an area of the MIM structure may be increased. As a result, capacitance of the capacitor may be improved. In addition, since the terminals are disposed in directions of the side surfaces of the capacitor, the capacitor may be implemented to have low equivalent series inductance (ESL).

In addition, since the capacitor according to an exemplary embodiment in the present disclosure may be formed in a structure having a thickness of 100 μm or less, the capacitor may be thinned. In addition, assuming that a diameter of the opening is 200 nm, there are openings of 8.2×108 to 1.6×109 per 1 cm2, and since the openings may be connected in parallel to each other, the capacitor may be implemented to have the low ESR.

As described above, since the capacitor according to an exemplary embodiment in the present disclosure has a high capacitance single layer structure, the capacitor may be used as a land-side capacitor (LSC) in a chip package requiring a thin thickness.

FIG. 5 is a cross-sectional view illustrating a capacitor including a body stacked according to another exemplary embodiment in the present disclosure.

Bodies including structures, first connection layers, and second connection layers are stacked to form one capacitor.

權(quán)利要求

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