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Capacitor and method of manufacturing the same

專利號
US10867752B2
公開日期
2020-12-15
申請人
SAMSUNG ELECTRO-MECHANICS CO., LTD.(KR Suwon-si)
發(fā)明人
Hyun Ho Shin; Jeong Hoon Ryou; Dong Sik Yoo; No Il Park; Chang Soo Jang; Young Kyu Park
IPC分類
H01G4/33; H01G4/232; H01G4/248; H01G4/012; H01G4/30; H01G4/12; H01L49/02; H01G4/08
技術(shù)領(lǐng)域
capacitor,layer,electrode,may,structure,first,second,surface,be,in
地域: Suwon-Si

摘要

A capacitor includes a structure including a plurality of openings penetrating from a first surface of the structure to a second surface opposing the first surface; a capacitor layer disposed on the second surface of the structure and in the plurality of the openings and including a dielectric layer, and a first electrode and a second electrode, the dielectric layer interposed between the first electrode and the second electrode; a first connection layer disposed on the first surface of the structure and connected to the first electrode; a second connection layer disposed on the capacitor layer on the second surface and connected to the second electrode of the structure; and first and second terminals disposed on opposite side surfaces of the structure and connected to the first connection layer and the second connection layer, respectively.

說明書

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

A method of manufacturing a capacitor according to an exemplary embodiment in the present disclosure may include an operation (S110) of preparing a structure including a plurality of openings penetrating from a first surface of the structure to a second surface opposing the first surface, an operation (S120) of forming a first connection layer on the first surface of the structure, an operation (S130) of forming a capacitor layer disposed on the second surface of the structure and the plurality of openings and including a dielectric layer, and a first electrode and a second electrode disposed while having the dielectric layer interposed therebetween, an operation (S140) of forming a second connection layer disposed on the second surface of the substrate and connected to the second electrode, and an operation (S150) of forming first and second terminals connected to the first connection layer and the second connection layer, respectively.

Hereinafter, the respective operations will be described with reference to FIGS. 7 through 14.

權(quán)利要求

1
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