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Capacitor and method of manufacturing the same

專利號
US10867752B2
公開日期
2020-12-15
申請人
SAMSUNG ELECTRO-MECHANICS CO., LTD.(KR Suwon-si)
發(fā)明人
Hyun Ho Shin; Jeong Hoon Ryou; Dong Sik Yoo; No Il Park; Chang Soo Jang; Young Kyu Park
IPC分類
H01G4/33; H01G4/232; H01G4/248; H01G4/012; H01G4/30; H01G4/12; H01L49/02; H01G4/08
技術(shù)領(lǐng)域
capacitor,layer,electrode,may,structure,first,second,surface,be,in
地域: Suwon-Si

摘要

A capacitor includes a structure including a plurality of openings penetrating from a first surface of the structure to a second surface opposing the first surface; a capacitor layer disposed on the second surface of the structure and in the plurality of the openings and including a dielectric layer, and a first electrode and a second electrode, the dielectric layer interposed between the first electrode and the second electrode; a first connection layer disposed on the first surface of the structure and connected to the first electrode; a second connection layer disposed on the capacitor layer on the second surface and connected to the second electrode of the structure; and first and second terminals disposed on opposite side surfaces of the structure and connected to the first connection layer and the second connection layer, respectively.

說明書

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

FIG. 1 is a perspective view illustrating a structure according to an exemplary embodiment of the present disclosure.

A capacitor according to an exemplary embodiment in the present disclosure may include a structure 110.

The structure 110 may include a plurality of openings 111 penetrating from a lower surface 110a of the structure 110 to an upper surface 110b opposing the lower surface 110a. Since the opening may be referred to as a pore, the structure may be referred to as a porous structure. Such a porous structure may be obtained by machining an anodic aluminum oxide (AAO) structure in which pores having a nanometer size (10 nm to 400 nm) are regularly arranged on a surface by an anodic oxidation method. An interval between the pores may be about several tens to several hundred nanometers. A size, an interval and a depth of the pores may be variously adjusted by changing conditions of the anodic oxidation method such as an anodic oxidation voltage, the type and concentration of electrolyte, and a temperature. A capacitor manufactured in a dot form on a wafer through an atomic layer deposition (ALD) process using the AAO structure is disclosed in a reference document (Banerjee et al., ECS Transactions, 25 (4) 345-353, 2009).

FIG. 2 is a perspective view illustrating a capacitor according to an exemplary embodiment of the present disclosure and FIG. 3 is a cross-sectional view illustrating a YZ surface of the capacitor taken along a line I-I′ of FIG. 2.

權(quán)利要求

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