E-beam apparatus
摘要
說(shuō)明書(shū)
Hence, the magnetic shield extends along the field of view of the electron optics system 500, i.e. the field of view for disturbances from stray magnetic fields. Furthermore, as the magnetic shield moves with the positioning device 510, a maximum movement length of the positioning device 510 is taken into account. Hence, at each position of the object table 520 within the (maximum) movement length, the field of view of the electron optics system 500 is faced with the magnetic shield. It will be understood that the term length may be applied to the x direction as well as to the y direction. Thus, the length may be understood is x direction or in y direction. For the sake of completeness, it is noted that the x and y direction may be understood as directions spanning a plane substantially parallel to a surface of the object to be inspected, while the z-direction may be understood as a direction perpendicular to the plane spanned by the x and y directions.
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