Furthermore, both in the example of FIG. 5 as well as the example of FIG. 6, a long stroke stage 511, 611—short stroke stage 512, 612 arrangement is applied. The positioning device 510, 610 comprises the short stroke stage 512, 612 to position the object table 520, 620 and the long stroke stage 511, 611 to position the short stroke stage 512, 612 and the object table 520, 620. The long stroke stage 511, 611 will generally be a higher power stage as compared to the short stroke stage 512, 612. Accordingly, a magnitude of a stray field by the long stroke stage 511, 611 may exceed a magnitude of a stray field by the short stroke stage 512, 612. In order to further reduce n effect of stray fields, the long stroke stage 511, 611 is arranged at a relatively large distance from the object table 520, 620. Accordingly, the long stroke stage 511, 611 comprises dual long stroke stage actuators 513, 613, the dual long stroke stage actuators 513, 613 being arranged spaced apart on either side of the short stroke stage 512, 612. The long stroke stage actuators 513, 613 are spaced apart seen in a direction parallel to a surface of the object that is to be inspected, i.e. in a direction parallel to a main plane of movement of the positioning device 510, 610, i.e. in the present example in a horizontal direction. The positioning device 510, 610 further comprises connecting structures 514, 614 connecting long stroke stage actuators 513, 613 to the long stroke carrier 511, 611 which holds the short stroke 512, 612. The connecting structures 514, 614 extend in the direction parallel to the main plane of movement of the positioning device 510, 610.