So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of its scope, and may admit to other equally effective embodiments.

FIG. 1 is a schematic cross-sectional illustration of a physical vapor deposition (PVD) chamber, according to various embodiments of the present disclosure.

FIG. 2 is a schematic cross-sectional illustration of coil portion of an electromagnet, in which the coil portion is mounted on a surface of one of the deposition shields of the PVD chamber of FIG. 1, according to various embodiments of the present disclosure.

FIG. 3 is a schematic cross-sectional illustration of a coil portion of an electromagnet and an associated annular structure that enables cooling of the coil portion via a cooling liquid, according to various embodiments of the present disclosure.

FIG. 4 is a schematic cross-sectional illustration of a coil portion of an electromagnet and an electrical lead connected thereto, according to embodiments of the present disclosure.

FIG. 5 schematically illustrates adjacent portions of two separately powered coils disposed within a PVD chamber, according to an embodiment of the present disclosure.