白丝美女被狂躁免费视频网站,500av导航大全精品,yw.193.cnc爆乳尤物未满,97se亚洲综合色区,аⅴ天堂中文在线网官网

Semiconductor device having high voltage lateral capacitor and manufacturing method thereof

專利號
US10868108B2
公開日期
2020-12-15
申請人
Taiwan Semiconductor Manufacturing Co., Ltd.(TW Hsinchu)
發(fā)明人
Meng-Han Lin; Te-Hsin Chiu; Wei Cheng Wu; Te-An Chen
IPC分類
H01L49/02; H01L27/08; H01L27/06; H01L23/64; H01L21/8234
技術領域
doped,heavily,in,136a,135b,lightly,capacitor,region,136b,structure
地域: Hsin-Chu

摘要

A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a substrate having isolation structures therein and a capacitor structure located on a top surface of the isolation structure. The capacitor structure comprises a semiconductor material pattern and an insulator pattern inlaid in the semiconductor material pattern. The semiconductor material pattern and the insulator pattern are located at a same horizontal level on the isolation structure.

說明書

FIG. 11 is a schematic perspective view showing a portion of the structure including a capacitor structure in accordance with some embodiments of the disclosure. The structure of FIG. 11 may be fabricated following the process steps depicted from FIG. 1 to FIG. 5 and FIG. 7. Only a portion of the structure in the isolating region IR is shown in FIG. 11. As shown in FIG. 11, the structure includes spacers 150 formed on sidewalls of the portions 135B, 136A and 136B, while the locations for the to-be formed contacts are labelled CT. In FIG. 11, the lightly doped portions 136A form a ring-shaped structure, and the heavily doped portion 135B is located in the middle of the ring-shaped structure like an islet and spaced apart from the ring-shaped structure. In FIG. 11, the ILD layer 180 is formed between the lightly doped portions 136A and the heavily doped portions 136B. The ILD layer 180 is also formed outside the ring-shaped structure of the lightly doped portions 136A and the heavily doped portions 136B.

權利要求

1
微信群二維碼
意見反饋