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Circuit structure and method for reducing electronic noises

專利號(hào)
US10868116B2
公開日期
2020-12-15
申請(qǐng)人
Taiwan Semiconductor Manufacturing Co., Ltd.(TW Hsinchu)
發(fā)明人
Ching-Hung Kao; Chi-Feng Huang; Fu-Huan Tsai; Victor Chiang Liang
IPC分類
H01L29/06; H01L29/66; H01L29/78; H01L29/10
技術(shù)領(lǐng)域
ldd,gate,stack,region,isolation,drain,doping,in,feature,hdd
地域: Hsinchu

摘要

In an embodiment, an integrated circuit (IC) device comprises a semiconductor substrate, an isolation region and an active region disposed on the semiconductor substrate, a gate stack disposed over the active region, and a source and a drain disposed in the active region and interposed by the gate stack in a first direction. The active region is at least partially surrounded by the isolation region. A middle portion of the active region laterally extends beyond the gate stack in a second direction that is perpendicular to the first direction.

說(shuō)明書

This is a non-provisional application of and claims priority to U.S. Provisional Patent Application Ser. No. 62/593,049, entitled “Circuit Structure and Method for Reducing Noises” and filed Nov. 30, 2017, the entire disclosure of which is hereby incorporated by reference.

BACKGROUND

An integrated circuit (IC) includes various devices (e.g., transistors, diodes, and resistors) connected together and configured to work as a functional circuit. In existing field effect transistors (FETs), different materials come into contact in a channel, creating various interface areas. For example, a channel has a horizontal interface with an overlaying gate dielectric layer and vertical interfaces with isolation features that extend into the channel from the sides. During field application, charge carriers (electrons or holes) travelling in the channel between a source and a drain are affected by such interfaces as the charge carriers get trapped and detrapped at the interfaces. The fluctuation in carrier mobility tends to generate or increase electronic noises, such as flicker noise and random telegraph signal (RTS) noise. Flicker noise (sometimes called 1/f noise or pink noise) is a low frequency noise that may exhibit an inverse frequency power density curve. RTS noise (sometimes called burst noise, popcorn noise, impulse noise, bi-stable noise) may cause sudden changes in channel current at random and unpredictable times. Although certain measures such as thinning down the gate dielectric thickness may reduce noises, a thinner gate dielectric layer may degrade performance of a transistor, for example, in high-voltage applications. Thus, a new device structure is desired to address the above concerns in high-voltage and other transistor applications.

BRIEF DESCRIPTION OF THE DRAWINGS

權(quán)利要求

1
What is claimed is:1. An integrated circuit (IC) device, comprising:a semiconductor substrate;an isolation region and an active region disposed on the semiconductor substrate, wherein the active region is at least partially surrounded by the isolation region;a gate stack disposed over the active region; anda source and a drain disposed in the active region, aligned along a first direction and interposed by the gate stack extending lengthwise in a second direction perpendicular to the first direction,wherein a middle portion of the active region laterally extends beyond the gate stack in the second direction,wherein the gate stack has a first length in the first direction and the middle portion of the active region has a second length in the first direction, wherein the first length is greater than the second length such that four corner portions of the gate stack laterally extend beyond the active region into the isolation region.2. The IC device of claim 1, wherein the second length is no less than 95% of the first length.3. The IC device of claim 1, wherein the middle portion of the active region laterally extends beyond the gate stack by a first distance in the second direction and the four corner portions of the gate stack laterally extend beyond the active region by a second distance in the second direction, wherein the first distance and the second distance are about equal.4. The IC device of claim 1, wherein the source and the drain are separated by a channel region with a channel length in the first direction and a channel width in the second direction, wherein the channel width is less than a width of the middle portion of the active region in the second direction.5. The IC device of claim 1, further comprising a spacer disposed on sidewalls of the gate stack, wherein a portion of the spacer is attached to an edge portion of the gate stack that corresponds to the middle portion of the active region, and wherein the portion of the spacer does not laterally extend into the isolation region in the second direction.6. The IC device of claim 1, further comprising a spacer portion disposed on a sidewall of the gate stack that runs along the first direction, wherein the spacer portion laterally extends beyond the active region into the isolation region for an entire length of the sidewall.7. The IC device of claim 1, wherein the middle portion of the active region comprises a low density doped (LDD) feature disposed adjacent an edge portion of the gate stack, wherein the LDD feature separates the edge portion of the gate stack from the isolation region.8. The IC device of claim 7, wherein the middle portion of the active region further comprises a high density doped (HDD) feature that separates the LDD feature from the isolation region.9. The IC device of claim 8, wherein the source and the drain include a first type dopant and are separated by a channel region, wherein the channel region, the LDD feature, and the HDD feature include a second type dopant with first, second, and third doping concentrations, respectively, wherein the second doping concentration is at least twice of the first doping concentration but is no more than a tenth of the third doping concentration.10. An integrated circuit (IC) device, comprising:a semiconductor substrate;an isolation feature disposed on the semiconductor substrate; anda field-effect transistor disposed on the semiconductor substrate, wherein the field-effect transistor comprises:a channel region adjacent the isolation feature;a source and a drain separated by the channel region;a gate stack over the channel region; anda low density doped (LDD) feature adjacent an edge portion of the gate stack, wherein at least a portion of the LDD feature is disposed in the channel region, the LDD feature separating the edge portion of the gate stack from the isolation feature,wherein the edge portion of the gate stack is disposed between two corner portions of the gate stack, wherein the LDD feature does not separate the two corner portions of the gate stack from the isolation feature, and wherein the two corner portions of the gate stack extend laterally into the isolation feature.11. The IC device of claim 10, wherein the gate stack comprises a spacer that is disposed directly above the LDD feature.12. The IC device of claim 10, wherein the source and the drain include a first type dopant, the channel region and the LDD feature include a second type dopant being opposite to the first type dopant, wherein the LDD feature has a doping concentration at least twice as high as that of the channel region.13. The IC device of claim 12, further comprising a high density doped (HDD) feature disposed on the channel region and separating the LDD feature from the isolation feature, wherein the HDD includes the second type dopant at a doping concentration that is at least 10 times as high as that of the LDD feature.14. A semiconductor device, comprising:a semiconductor substrate;an active region disposed on the semiconductor substrate and comprising a first portion, a second portion and a middle portion disposed between the first portion and the second portion along a first direction;an isolation region disposed on the semiconductor substrate and at least partially surrounding the active region;a gate stack disposed over the active region;a source disposed in the first portion of the active region; anda drain disposed in the second portion of the active region,wherein the source and drain are aligned along the first direction and interposed by the gate stack extending lengthwise in a second direction perpendicular to the first direction,wherein each of the first portion and the second portion includes a first width along the second direction and the middle portion includes a second width along the second direction,wherein the second width is greater than the first width.15. The semiconductor device of claim 14, wherein the middle portion of the active region laterally extends beyond the gate stack in the second direction.16. The semiconductor device of claim 14, wherein the middle portion of the active region comprises a low density doped (LDD) feature disposed adjacent an edge portion of the gate stack, wherein the LDD feature separates the edge portion of the gate stack from the isolation region.17. The semiconductor device of claim 16, wherein the middle portion of the active region further comprises a high density doped (HDD) feature that separates the LDD feature from the isolation region.18. The semiconductor device of claim 16, further comprising a spacer portion disposed along a sidewall of the gate stack, wherein the spacer is partially disposed on the LDD feature.19. The semiconductor device of claim 14,wherein the gate stack comprises a gate width along the second direction,wherein the second width is greater than the gate width,wherein the first width is smaller than the gate width.20. The semiconductor device of claim 14,wherein the middle portion comprises an edge portion,wherein the edge portion comprises a first length along the first direction,wherein the gate stack comprises a gate length along the first direction, andwherein the gate length is greater than the first length.
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