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Method for forming apparatus comprising two dimensional material

專利號
US10868121B2
公開日期
2020-12-15
申請人
Nokia Technologies Oy(FI Espoo)
發(fā)明人
Darryl Cotton; Yinglin Liu; Adam Robinson; Alexander Bessonov; Richard White
IPC分類
H01L29/16; H01L29/66; H01L29/778; H01L31/028; H01L29/12; H01L29/06; H01L29/417; H01L29/423; G01N27/414; H01L31/112
技術領域
mouldable,layer,graphene,material,release,may,polymer,electrodes,two,be
地域: Espoo

摘要

A method and apparatus, the method comprising: forming a layer of two dimensional material (23), in particular graphene, on a first release layer; forming, possibly a (gate) insulating layer (35), and at least two, preferably three, electrodes (25); forming a second release layer overlaying at least a portion of the layer of two dimensional material; providing a mouldable polymer (24, 26, 28) overlaying the at least two electrodes and the second release layer; and removing the first and second release layers to provide a cavity (29) between the mouldable polymer (26) and the layer of two dimensional material (23).

說明書

The dielectric 35 may be arranged to provide an electrically insulating layer between the graphene and one or more of the electrodes 25 or other components of the apparatus 21. The dielectric 35 may comprise any suitable electrically insulating material. In some examples the dielectric 35 may comprise aluminum oxide which could be deposited using atomic layer deposition or any other suitable process. In some examples the dielectric 35 may comprise a polymer or any other suitable material.

In some examples the dielectric 35 may also be arranged as a barrier to protect the graphene from contamination. For instance the dielectric 35 could comprise a material which is impermeable, or partially impermeable to contaminants such as water or oxygen or anything else which could contaminate or affect the charge carrier characteristics of the graphene.

In some examples the graphene may be activated before the dielectric 35 is deposited. The activation of the graphene may counteract the low surface energy of the graphene and may enable uniform deposition of the dielectric 35 over the graphene. For instance, a seed layer may be evaporated onto the graphene to enable the atomic layer deposition of the dielectric 35.

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