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Method for forming apparatus comprising two dimensional material

專利號
US10868121B2
公開日期
2020-12-15
申請人
Nokia Technologies Oy(FI Espoo)
發(fā)明人
Darryl Cotton; Yinglin Liu; Adam Robinson; Alexander Bessonov; Richard White
IPC分類
H01L29/16; H01L29/66; H01L29/778; H01L31/028; H01L29/12; H01L29/06; H01L29/417; H01L29/423; G01N27/414; H01L31/112
技術(shù)領(lǐng)域
mouldable,layer,graphene,material,release,may,polymer,electrodes,two,be
地域: Espoo

摘要

A method and apparatus, the method comprising: forming a layer of two dimensional material (23), in particular graphene, on a first release layer; forming, possibly a (gate) insulating layer (35), and at least two, preferably three, electrodes (25); forming a second release layer overlaying at least a portion of the layer of two dimensional material; providing a mouldable polymer (24, 26, 28) overlaying the at least two electrodes and the second release layer; and removing the first and second release layers to provide a cavity (29) between the mouldable polymer (26) and the layer of two dimensional material (23).

說明書

In FIG. 4 the dielectric 35 is provided spanning the discontinuity 29. A first end 52 of the layer of dielectric 35 is supported by the moldable polymer 27 on the first side of the discontinuity 29. A second end 54 of the dielectric 35 is supported by the moldable polymer 27 on the second side of the discontinuity 29. The first side may be opposite to the second side. A middle portion 56 is provided between the two ends 52, 54 of the dielectric 35. The middle portion 56 of the dielectric 35 extends over the discontinuity 29 so that the middle portion of the dielectric 35 is set a distance apart from the moldable polymer 27.

The apparatus 21 also comprises a source electrode 45 and a drain electrode 47. The source electrode 45 and drain electrode 47 may be supported by the mouldable polymer 27 so that the mouldable polymer 27 bears the weight of both the source electrode 45 and the drain electrode 47.

The source electrode 45 is provided on the first side of the discontinuity 29 and may be arranged to be connected to the first end 51 of the layer of two dimensional material 23. The drain electrode 47 is provided on the second side of the discontinuity 29 and is arranged to be connected to the second end 53 of the layer of two dimensional material 23.

權(quán)利要求

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