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Method for forming apparatus comprising two dimensional material

專利號
US10868121B2
公開日期
2020-12-15
申請人
Nokia Technologies Oy（FI Espoo）
發(fā)明人
Darryl Cotton; Yinglin Liu; Adam Robinson; Alexander Bessonov; Richard White
IPC分類
H01L29/16; H01L29/66; H01L29/778; H01L31/028; H01L29/12; H01L29/06; H01L29/417; H01L29/423; G01N27/414; H01L31/112
技術(shù)領(lǐng)域
mouldable,layer,graphene,material,release,may,polymer,electrodes,two,be
地域： Espoo

摘要

A method and apparatus, the method comprising: forming a layer of two dimensional material (23), in particular graphene, on a first release layer; forming, possibly a (gate) insulating layer (35), and at least two, preferably three, electrodes (25); forming a second release layer overlaying at least a portion of the layer of two dimensional material; providing a mouldable polymer (24, 26, 28) overlaying the at least two electrodes and the second release layer; and removing the first and second release layers to provide a cavity (29) between the mouldable polymer (26) and the layer of two dimensional material (23).

說明書

In some examples the apparatus may comprise a rigid portion aligned with the discontinuity.

In some examples the two dimensional material may comprise graphene.

In some examples the layer of two dimensional material may be activated. The layer of two dimensional material may be activated with quantum dots.

According to various, but not necessarily all, examples of the disclosure there is provided examples as claimed in the appended claims.

BRIEF DESCRIPTION

For a better understanding of various examples that are useful for understanding the detailed description, reference will now be made by way of example only to the accompanying drawings in which:

FIG. 1 illustrates a method;

FIG. 2 illustrates an apparatus;

FIGS. 3A to 3I illustrate an example method;

FIG. 4 is a plan view of an apparatus; and

FIG. 5 is a plan view of another apparatus.

 DETAILED DESCRIPTION

The Figures illustrate example methods and apparatus 21. The methods may be used to form apparatus 21 comprising two dimensional material. The apparatus 21 may form electronic components within electronic devices or parts of electronic components within electronic devices. In some examples the apparatus 21 which are formed may be for sensing. The apparatus 21 may be for sensing environmental parameters such as light, temperature, chemicals or other parameters.

權(quán)利要求

1
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