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Method for forming apparatus comprising two dimensional material

專利號(hào)
US10868121B2
公開日期
2020-12-15
申請(qǐng)人
Nokia Technologies Oy(FI Espoo)
發(fā)明人
Darryl Cotton; Yinglin Liu; Adam Robinson; Alexander Bessonov; Richard White
IPC分類
H01L29/16; H01L29/66; H01L29/778; H01L31/028; H01L29/12; H01L29/06; H01L29/417; H01L29/423; G01N27/414; H01L31/112
技術(shù)領(lǐng)域
mouldable,layer,graphene,material,release,may,polymer,electrodes,two,be
地域: Espoo

摘要

A method and apparatus, the method comprising: forming a layer of two dimensional material (23), in particular graphene, on a first release layer; forming, possibly a (gate) insulating layer (35), and at least two, preferably three, electrodes (25); forming a second release layer overlaying at least a portion of the layer of two dimensional material; providing a mouldable polymer (24, 26, 28) overlaying the at least two electrodes and the second release layer; and removing the first and second release layers to provide a cavity (29) between the mouldable polymer (26) and the layer of two dimensional material (23).

說(shuō)明書

The mouldable polymer 27 may comprise any polymer material which is fluid enough to embed the electrodes 25 and layer of two dimensional material 23. Once the mouldable polymer 27 is provided around the electrodes 25 and the second release layer 37 the mouldable polymer 27 may be cured or otherwise hardened. Once the mouldable polymer 27 has hardened it may form a substrate for the at least two electrodes 25. Once the mouldable polymer 27 has hardened the second release layer 37 may be removed.

The mouldable polymer 27 has different thicknesses across the cross section of the apparatus 21. In the example of FIG. 2 the mouldable polymer 27 comprises a first portion 24, a second portion 26 and a third portion 28. The first portion 24 supports a first electrode 25 and the second portion supports a second electrode 25. The first and second portions 24, 26 of the mouldable polymer 27 may contact the electrodes 25. The first and second portions 24, 26 of the mouldable polymer 27 may have the same thickness.

權(quán)利要求

1
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