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Semiconductor device including standard cells with header/footer switch including negative capacitance

專利號(hào)
US10868132B2
公開(kāi)日期
2020-12-15
申請(qǐng)人
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.(TW Hsinchu)
發(fā)明人
Chien-Hsing Lee; Chih-Sheng Chang; Wilman Tsai; Chia-Wen Chang; Ling-Yen Yeh; Carlos H. Diaz
IPC分類
H01L29/51; H01L29/66; H01L27/11; H01L27/092; H01L29/16; H01L29/40; H01L29/78
技術(shù)領(lǐng)域
fet,mos,nc,gate,dielectric,layer,fets,potential,switch,in
地域: Hsinchu

摘要

A semiconductor device includes a first potential supply line for supplying a first potential, a second potential supply line for supplying a second potential lower than the first potential, a functional circuit, and at least one of a first switch disposed between the first potential supply line and the functional circuit and a second switch disposed between the second potential supply line and the functional circuit. The first switch and the second switch are negative capacitance FET.

說(shuō)明書

FIG. 3A shows a cross sectional view of a metal-insulator-metal-insulator-semiconductor (MIMIS) FET-type NC FET and FIGS. 3B and 3C show cross sectional views of metal-insulator-semiconductor (MIS) FET-type NC FETs.

FIGS. 4A, 4B, 4C and 4D show manufacturing operations for an NC FET in accordance with an embodiment of the present disclosure.

FIGS. 5A, 5B and 5C show various views of an NC FET in accordance with an embodiment of the present disclosure.

FIGS. 6A, 6B, 6C and 6D show manufacturing operations for an NC FET in accordance with an embodiment of the present disclosure.

FIGS. 7A, 7B, 7C and 7D show manufacturing operations for an NC FET in accordance with an embodiment of the present disclosure.

FIGS. 8A, 8B, 8C and 8D show manufacturing operations for an NC FET in accordance with an embodiment of the present disclosure.

FIGS. 9A, 9B, 9C, 9D, 9E and 9F show circuit diagrams according to embodiments of the present disclosure.

FIGS. 10A and 10B show circuit diagrams according to embodiments of the present disclosure.

FIGS. 11A and 11B show circuit diagrams according to embodiments of the present disclosure.

DETAILED DESCRIPTION

權(quán)利要求

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