Each fin 222 has a height h, a width w₁ defined by a pair of sidewalls, and a length l defined by a pair of sidewalls (not shown in the depicted view). Adjacent fins 222 are separated by a space S₁, where a pitch P of fins 222 generally refers to a sum of a width of a particular fin 222 (such as w₁) and a width of a space adjacent to the particular fin 222 (such as S₁) (in other words, P=w₁+S₁). In some implementations, pitch P is a minimum pitch achievable between fins 222 by a lithography process for a given technology node. In some implementations, height h is about 30 nm to about 80 nm, and width w₁ is about 1 nm to about 30 nm. For example, in the depicted embodiment, height h is about 30 nm to about 80 nm, and width w₁ is about 2 nm to about 20 nm. In some implementations, space S₁ is about 10 nm to about 30 nm. In some implementations, pitch P is about 10 nm to about 50 nm. The present disclosure contemplates variations in height h, width w₁, and length l of fins 222 that may arise from processing and fabrication of FinFET device 200. For example, though each fin 222 is depicted as having substantially the same width w₁ along height h, in some implementations, width w₁ represents an average width of a given fin 222. In some implementations, a width of fins 222 varies from an upper portion of fins 222 to a lower portion of fins 222, where width w₁ represents an average of the varying widths. In some implementations, the width tapers from the upper portion of fins 222 to the lower portion of fins 222, such that an average width of the upper portion is less than an average width of the lower portion. In some implementations, width w₁ can vary from about 5 nm to about 15 nm along fins 222 depending on where width w₁ is measured along height h of fins 222. In some implementations, width w₁ of fins 222 varies depending on a position of fins 222 relative to one another and/or relative to other features of FinFET device 200. For example, width w₁ of center fins 222 (in the depicted embodiment, FinFET device 200 includes two center fins 222) may be greater than width w₁ of edge fins 222 (here, the leftmost fin 222 and the rightmost fin 222, which enclose the two center fins 222). In another example, alternatively, width w₁ of center fins 222 is less than width w₁ of edge fins 222. In both such implementations, width w₁ of edge fins 222 can represent an average width of edge fins 222, and width w₁ of center fins 222 can represent an average width of center fins 222.