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Method for manufacturing chip-mounting substrate, and chip-mounting substrate

專利號(hào)
US10868221B2
公開日期
2020-12-15
申請(qǐng)人
POINT ENGINEERING CO., LTD.(KR Asan)
發(fā)明人
Bum Mo Ahn; Seung Ho Park; Tae Hwan Song
IPC分類
H01L21/48; H01L33/48; H01L23/00; H01L33/62; H01L33/60; H01L33/46; H01L23/498
技術(shù)領(lǐng)域
substrate,metal,precoat,uneven,formed,chip,coating,layer,portion,insulating
地域: Asan

摘要

A method for manufacturing a chip-mounting substrate includes a pre-coating step of forming a precoat on a substrate including a plurality of conductive portions and an insulating portion interposed between the conductive portions, an etching step of etching at least a portion of the precoat through a laser to form a pattern, and a step of forming a metal layer on the substrate. The pattern is disposed on at least one of the conductive portions, and the metal layer is formed in the pattern.

說明書

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

However, this method has a problem in that high plating cost is required. Furthermore, a problem is posed in that chemical corrosion occurs due to the inclusion of a chemical etching work. Moreover, the process is complex.

In another conventional method differing from the aforementioned method, as shown in FIG. 3, a photoresist coating 4 is formed on a metal substrate 110 having an insulating portion 120 and is allowed to cure. After a mask 5 having a pattern formed in a bump shape is disposed on the photoresist coating 4, a pattern is formed on the photoresist coating 4 through ultraviolet exposure and development. Bumps 130 are formed in the pattern. The remaining photoresist coating 4 is removed.

However, in the method using the mask in this way, there is a problem in that a separate mask is required. Furthermore, the use of the flat mask poses a problem that the accuracy decreases when the bumps 130 are formed on a metal substrate having a cavity 140. In addition, it is difficult to manufacture a mask bent in a shape corresponding to the shape of the cavity 140 having a small size.

PRIOR ART DOCUMENTS Patent Documents

Patent Document 1: Korean Patent Registration No. 10-1582494

SUMMARY

In view of the problems mentioned above, it is an object of the present invention to provide a method for manufacturing a chip-mounting substrate, which does not require a separate mask, uses a simple process and enhances accuracy.

權(quán)利要求

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