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Manufacturing method of organic light-emitting display and mask assembly

專利號
US10868268B2
公開日期
2020-12-15
申請人
SAMSUNG DISPLAY CO., LTD.（KR Yongin-si）
發(fā)明人
Hoon Kim; Keehyun Nam; Junwoo Kim; Hyesuk An; Gyunghyun Ko
IPC分類
H01L51/50; H01L27/12; H01L21/02; H01L51/52
技術(shù)領(lǐng)域
mask,may,layer,pixel,portion,deposition,display,protruding,area,be
地域： Yongin-si

摘要

A method of manufacturing a display device includes preparing a pixel circuit substrate including thin-film transistors and pixel electrodes respectively electrically connected to the thin-film transistors, forming a first deposition layer on the pixel circuit substrate using a first mask assembly, and forming a second deposition layer on the pixel circuit substrate using a second mask assembly. At least one of the first mask assembly and the second mask assembly includes a mask plate including an opening portion through which a deposition material passes and a covering portion that blocks a passage of the deposition material. The mask plate includes a protruding portion that protrudes from an edge of the covering portion toward a center region of the opening portion.

說明書

FIG. 9 illustrates a cross-sectional view of a second manufacturing device that may be used in a manufacturing process of a display device according to an embodiment.

Referring to FIG. 9, a second manufacturing device 2000 may include a chamber 2010, a third supporting portion 2020, a fourth supporting portion 2030, a source portion 2060, a pressure regulator 2070, and a vision portion 2080.

The chamber 2010 may include a space therein. One side of the chamber 2010 may be opened. A gate valve 2011 may be arranged in the open area to shield or close the open area.

The third supporting portion 2020 may be in the chamber 2010 to support the pixel circuit substrate D. In an embodiment, the third supporting portion 2020 may be fixed in the chamber 2010 and the pixel circuit substrate D may be above the third supporting portion 2020. In another embodiment, the third supporting portion 2020 may be in the form of a shuttle that is linearly movable within the chamber 2010. In another embodiment, the third supporting portion 2020 may be in the form of a clamp that is arranged inside the chamber 2010 and that holds the pixel circuit substrate D. In some implementations, the third supporting portion 2020 may include an electrostatic chuck or an adhesive chuck for fixing the pixel circuit substrate D in the chamber 2010.

權(quán)利要求

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