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Manufacturing method of organic light-emitting display and mask assembly

專利號(hào)
US10868268B2
公開(kāi)日期
2020-12-15
申請(qǐng)人
SAMSUNG DISPLAY CO., LTD.(KR Yongin-si)
發(fā)明人
Hoon Kim; Keehyun Nam; Junwoo Kim; Hyesuk An; Gyunghyun Ko
IPC分類
H01L51/50; H01L27/12; H01L21/02; H01L51/52
技術(shù)領(lǐng)域
mask,may,layer,pixel,portion,deposition,display,protruding,area,be
地域: Yongin-si

摘要

A method of manufacturing a display device includes preparing a pixel circuit substrate including thin-film transistors and pixel electrodes respectively electrically connected to the thin-film transistors, forming a first deposition layer on the pixel circuit substrate using a first mask assembly, and forming a second deposition layer on the pixel circuit substrate using a second mask assembly. At least one of the first mask assembly and the second mask assembly includes a mask plate including an opening portion through which a deposition material passes and a covering portion that blocks a passage of the deposition material. The mask plate includes a protruding portion that protrudes from an edge of the covering portion toward a center region of the opening portion.

說(shuō)明書(shū)

The vision portion 2080 may photograph the pixel circuit substrate D and the second mask assembly 200 in the chamber 2010. The pixel circuit substrate D and the second mask assembly 200 may be aligned based on an image photographed by the vision portion 2080.

A sub-layer of the intermediate layer of the display device 10 described above with reference to FIG. 2, for example, the first common layer 22A and/or the second common layer 22C, or the opposite electrode 23, may be formed in the second manufacturing device 2000. Hereinafter, for convenience of description, a process of forming the first common layer 22A will be described.

First, the second mask assembly 200 and the pixel circuit substrate D are arranged inside the chamber 2010. When the pixel circuit substrate D and the second mask assembly 200 are arranged, a first alignment mark of the pixel circuit substrate D and a third alignment mark of the second mask assembly 200 may be photographed and compared with each other through the vision portion 2080 so that the positions of the pixel circuit substrate D and the second mask assembly 200 may be adjusted. The fourth supporting portion 2030 may finely adjust the position of the second mask assembly 200.

權(quán)利要求

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