615 Etched region isolating large single mesa from Ground Frame
Process for Embodiments 1 and 2 of US Pat App Pub 2017/0033535
An example embodiment of the process steps to create the single structure for embodiments 1 and 2 with implant current confinement can be as follows.
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- Step 1. Use photolithography to mask areas which will not have P Metal deposited.
- Step 2. Deposit P Metal (typically TiPtAu ?2000 A)
- Step 3. Photolithography lift off and wafer cleaning. O2 descum or ash all organics off wafer.
- Step 4. Dielectric deposit (typically SiNx ?<1000 A) used as an etch mask
- Step 5. Photolithographic masking using either photoresist or metal deposited in areas to protect the epi material from being damaged from the implant which makes the unprotected regions non-conductive through ion bombardment. This step can be performed later in the process but may be more difficult due to more varied topology.
- Step 6. Implant—Those skilled in the art of calculating the implant doses will determine the dose and species of implant needed to disrupt the materials structures to the depth which will isolate the p regions and the quantum wells from each other
- Step 7 Cleaning this photolithography is difficult due to the implant and a deposition of metal over the photolithography such as plating could help to make it easier to clean off the resist.