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Manufacturing method for wiring board

專利號
US10874021B2
公開日期
2020-12-22
申請人
DISCO CORPORATION(JP Tokyo)
發(fā)明人
Ye Chen; Frank Wei
IPC分類
H05K3/26; H05K3/46; H05K3/04; B24B37/04; C25D5/48; C25D7/12; H01L21/48; H01L23/498; H01L23/00; H05K3/10; H05K3/00
技術(shù)領(lǐng)域
insulating,wiring,21a,layers,layer,circuit,21c,face,21b,step
地域: Tokyo

摘要

A method for manufacturing a wiring board that has a rewiring layer on a surface thereof includes forming an insulating layer on a core substrate, forming a groove, in which a wiring layer of a circuit pattern is to be provided, on the insulating layer, forming a metal seed layer on an exposed face of the insulating layer on which the groove is formed, electrodepositing metal, which is to form the wiring layer, by plating to fill the groove with the metal to form a metal layer on the seed layer, machining the metal layer by a cutting tool to remove the metal layer up to a position not reaching the top of the insulating layer, and performing etching or a CMP process to expose the top of the insulating layer thereby to form the wiring layer in the groove and flatten an exposed face of the wiring layer.

說明書

The present invention is not limited to the details of the above described preferred embodiments. The scope of the invention is defined by the appended claims and all changes and modifications as fall within the equivalence of the scope of the claims are therefore to be embraced by the invention.

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