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High efficiency laser-sustained plasma light source

專利號(hào)
US10887974B2
公開日期
2021-01-05
申請(qǐng)人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

FIGS. 1A-10 illustrate a multi-pass system 100 for efficiently generating LSP plasma, in accordance with one or more embodiment of the present disclosure. In one embodiment, as shown in FIG. 1A, the system 100 includes pump source 104 (e.g., one or more lasers) configured to generate a beam 101 of pumping illumination for sustaining plasma 106. The pump beam 101 is suitable for sustaining a plasma 106 within a volume of gas 107. The plasma 106, in response to the optical pumping from the pump beam 101, emits broadband radiation 115. In another embodiment, the system 100 includes a multi-pass optical assembly 102. In one embodiment, the multi-pass optical assembly 102 includes one or more optical elements 110a-110f configured to perform multiple passes 108a-108d of the pumping beam through a portion of gas 107 to sustain the plasma 106. In another embodiment, the one or more optical elements 110a-110f are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma 106 and direct the collected unabsorbed portion of the pumping beam back into the plasma 106 and/or gas 107 near the plasma 106. As noted previously herein, the multi-pass optical assembly 102 is particularly useful in low pressure settings where the absorption of pump illumination by the plasma 106 is small. The one or more optical elements 110a-110f of the multi-pass assembly 102 provide for the “recycling” of the pump illumination, whereby the unabsorbed portion of the pump beam redirects the unabsorbed pump beam and back into to the plasma 106 and/or the gas 107 proximate to the plasma 106.

權(quán)利要求

1
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