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High efficiency laser-sustained plasma light source

專利號
US10887974B2
公開日期
2021-01-05
申請人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

As shown in FIG. 1A, the pump beam 101 performs a first pass 108a of the plasma 106. A first portion of the initial pass 108a of the pump beam 101 is absorbed by the plasma 106 and/or gas 107 proximate to the plasma 106. A second portion of the initial pass 108a of the beam 101 is transmitted through the partially transparent plasma 106 and is collected by mirror 110a. Mirror 110a then directs the collected illumination to a second mirror 110b, which, in turn, performs a second pass 108b of the pump beam 101 through the plasma 106. Again, a first portion of the second pass 108b of the beam 101 is absorbed by the plasma 106 and/or gas 107 proximate to the plasma 106, while a second portion of the second pass 108b of the beam 101 is transmitted through the plasma 106. This process is repeated multiple times via mirrors 110c-110d to execute passes 108c and 108d of the pump beam 101 through the plasma 106. It is noted that the scope of the present disclosure is not limited to the number or arrangement of mirrors depicted in FIG. 1A, which is provided merely for illustrative purposes. It is recognized herein that the multi-pass assembly 102 may include any number of optical elements (e.g., reflective and/or transmissive) positioned and orientated in any manner to accomplish multiple passes of pump illumination through the plasma 106.

權(quán)利要求

1
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