FIG. 1C illustrates system 100 equipped with a set of collection optics 103, in accordance with one or more embodiments of the present disclosure. In one embodiment, the set of collection optics 103 includes one or more collection optical elements 111a-111f configured to direct broadband radiation 115 emitted by the plasma 106 to one or more downstream optical elements 105 such as, but not limited to, a homogenizer, lens, mirror, filter, and/or an aperture. In this sense, the collection optical elements 111a-111f serve to combine multiple images of the plasma 106, which results in a broadband output having increased brightness.
In one embodiment, as depicted in FIG. 1C, the collection optical elements 111a-111f may be arranged in the same plane as the multi-pass optical elements 110a-110f. In this embodiment, the collection optical elements 111a-111f are interspersed between the multi-pass optical elements 110a-110f so as not to interfere with the line of sign associated with the multi-pass optical elements 110a-110f. As broadband light 115 is emitted by the plasma 106 a portion of the light 115 is collected by a first collection element 111a and directed back to the plasma 106 and/or gas 107 proximate to the plasma 106 via a second collection element 111b. This process can be repeated any number of times via additional collection optical elements 111c-111f to carry out additional passes through the plasma 106 and/or gas 107 proximate to the plasma 106.