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High efficiency laser-sustained plasma light source

專利號
US10887974B2
公開日期
2021-01-05
申請人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術領域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

FIG. 1C illustrates system 100 equipped with a set of collection optics 103, in accordance with one or more embodiments of the present disclosure. In one embodiment, the set of collection optics 103 includes one or more collection optical elements 111a-111f configured to direct broadband radiation 115 emitted by the plasma 106 to one or more downstream optical elements 105 such as, but not limited to, a homogenizer, lens, mirror, filter, and/or an aperture. In this sense, the collection optical elements 111a-111f serve to combine multiple images of the plasma 106, which results in a broadband output having increased brightness.

In one embodiment, as depicted in FIG. 1C, the collection optical elements 111a-111f may be arranged in the same plane as the multi-pass optical elements 110a-110f. In this embodiment, the collection optical elements 111a-111f are interspersed between the multi-pass optical elements 110a-110f so as not to interfere with the line of sign associated with the multi-pass optical elements 110a-110f. As broadband light 115 is emitted by the plasma 106 a portion of the light 115 is collected by a first collection element 111a and directed back to the plasma 106 and/or gas 107 proximate to the plasma 106 via a second collection element 111b. This process can be repeated any number of times via additional collection optical elements 111c-111f to carry out additional passes through the plasma 106 and/or gas 107 proximate to the plasma 106.

權利要求

1
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