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High efficiency laser-sustained plasma light source

專利號(hào)
US10887974B2
公開日期
2021-01-05
申請(qǐng)人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說(shuō)明書

FIGS. 1M-1N illustrate the multi-pass optical assembly 102 including one or more retro-reflector assemblies arranged in a resonator configuration, in accordance with one or more embodiments of the present disclosure. In one embodiment, as shown in FIG. 1M, the multi-pass optical assembly 102 may include, but is not limited to, two or more retro-reflectors 116a, 116b arranged in a resonator configuration. In this regard, the first retro-reflector 116a and the second retro-reflector 116b form a resonator. In this embodiment, following the first pass of pump illumination 101 through the plasma 106, mirrors 110a, 110b collect and direct the unabsorbed pump illumination 101 back through the plasma 106 to execute a second pass. In turn, the first retro-reflector 116a (e.g., spherical mirror), receives the unabsorbed pump illumination from the second pass and reflects the pump illumination back through the plasma 106 to execute a third pass of pump illumination 101 through the plasma 106. In turn, mirrors 110b, 110a then return the light of the third pass back through the plasma 106 to execute a fourth pass through the plasma 106. Then, the second retro-reflector 116b receives the light from the fourth pass and repeats the optical path sequence.

權(quán)利要求

1
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