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High efficiency laser-sustained plasma light source

專利號(hào)
US10887974B2
公開日期
2021-01-05
申請人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

FIGS. 1P-1Q illustrate the multi-pass optical assembly 102 equipped with one or more wavefront sensors for measuring aberration in the multi-pass optical assembly, in accordance with one or more embodiments of the present disclosure. It is noted that aberrations in the multi-pass assembly 102 may accumulate in the transmitted pump laser wavefront after passing through the plasma 106 multiple times. Aberrations may result from the variation of the index of refraction in the plasma and surrounding gas. These aberrations prevent efficient focusing of the laser on the subsequent passes. In one embodiment, the multi-pass optical assembly 102 may be configured to correct or at least reduce these aberrations. In one embodiment, the multi-pass assembly 102 includes one or more wave-front sensors 128 and one or more adaptive optical elements 118 communicatively coupled to the wave-front sensor 128. In another embodiment, the one or more wave-front sensors 128 may collect illumination along one or more of the pumping paths of the multi-pass assembly 102 and measure for aberration. In turn, the wave-front sensor 128 may transmit this measurement to one or more adaptive optical elements 118, which may then adjust the wave-front of the beam reflecting off of the adaptive optical element 118 in order to compensate for the aberration measured at the wave-front sensor 128. The adaptive optical element may include any adaptive optical element known in the art, such as, but not limited to, a digital micromirror array device.

權(quán)利要求

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