High efficiency laser-sustained plasma light source
摘要
說明書
In another embodiment, as shown in
In another embodiment, although not shown, the system 100 may include one or controllers communicatively coupled to the one or more wave-front sensors 128 and the one or more adaptive optical elements 118 and/or 130. In this regard, the one or more controllers may receive the wave-front data from the one or more wave-front sensors 128 and analyze the data for aberrations. In turn, the controller may send one or more control signals to the one or more adaptive optics to direct the one or more adaptive optics to compensate for the measured aberration. The controller may include one or more processors and one or more memory for storing program instructions. The program instructions may be pre-programmed to cause the one or more processors to execute the about steps.
