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High efficiency laser-sustained plasma light source

專利號
US10887974B2
公開日期
2021-01-05
申請人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

FIGS. 2A-2H illustrate a multi-pass system 100 equipped with a reflector assembly 202, in accordance with one or more embodiment of the present disclosure. The reflector assembly 202 of this embodiment may provide for radiances that are much closer to the blackbody limit. The collection of multiple passes through a plasma allows for the optimization of the gas pressure as if the plasma was much larger. As a result, the absorption/emissivity of the desired broadband output wavelengths in the plasma per each pass can be reduced. In the case where a similar geometry is used for the pumping illumination, the absorption of pumping illumination can be reduced as well, allowing for a lower gas pressure. The operation of system 100 at lower gas pressure aids in reducing “gas wiggle,” which result from density and temperature gradients leading to variations in the refractive index.

In addition, light emitted by the plasma 106 of the reflector assembly 202 at angles that do not take it to an output port are always focused back to (or proximate to) the plasma(s). As a result, light that would normally be lost is partially used to pump the plasma(s). Such a configuration results in an improvement of efficiency of the system 100 relative to single-pass systems and allows for a less powerful pump source 104 to achieve a given broadband radiance.

FIGS. 2A-2B illustrate cross-sectional views of the reflector assembly 202 of system 100, in accordance with one or more embodiments of the present disclosure. It is noted that FIG. 2A represents a cross-section that is perpendicular with respect to the cross-section of FIG. 2B.

權(quán)利要求

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