High efficiency laser-sustained plasma light source
摘要
說(shuō)明書(shū)
A multi-pass laser-sustained plasma system for generating broadband light is disclosed, in accordance with one or more embodiments of the present disclosure. In one embodiment, the system includes a pump source configured to generate a pumping beam. In another embodiment, the system includes a gas containment structure for containing a gas. In another embodiment, the system includes an optical assembly. In another embodiment, the optical sub-system includes one or more optical elements configured to perform one or more passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. In another embodiment, the system includes a collection assembly including one or more collection optics. In another embodiment, the system includes one or more collection optics configured to direct at least a portion of broadband radiation emitted by the plasma to one or more downstream optical elements. In another embodiment, the system includes one or more collection optical elements configured to collect and direct at least a portion of broadband radiation emitted by the plasma back to the plasma.
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