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High efficiency laser-sustained plasma light source

專利號
US10887974B2
公開日期
2021-01-05
申請人
KLA-Tencor Corporation(US CA Milpitas)
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域: CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

In one embodiment, the reflector assembly 202 is an ellipsoid-shaped shell having a reflective internal surface 203. In one embodiment, as shown in FIG. 2A, pump illumination 101 enters the reflector assembly 202 and is focused to a first focus 201a of the reflector assembly 202 by the reflective internal surface 203. In response to the excitation energy from the pump illumination 101, a plasma is sustained (initiated and/or maintained) at the first focus 201a. In turn, as shown in FIG. 2B, broadband light is 115 is emitted from the plasma 106. In another embodiment, the internal reflective surface of the reflector assembly 202 is configured to collect at least a portion of the broadband radiation emitted by the plasma and direct the collected broadband radiation back to the plasma 106. This process is repeated until a given portion of the broadband light 115 is absorbed by the plasma 106 or exits the exit aperture 206. In this regard, the internal reflective surface 203 of the reflector assembly 202 serves to combine two or more images of the plasma 106 such that an output portion of the broadband radiation 115 has a brightness larger than a brightness of a single image of the plasma 106. It is noted that the path of the redirected broadband light 115 may first pass through the second focus 201b prior to reaching the first focus 201a.

權(quán)利要求

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