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High efficiency laser-sustained plasma light source

專利號
US10887974B2
公開日期
2021-01-05
申請人
KLA-Tencor Corporation（US CA Milpitas）
發(fā)明人
Matthew Derstine; Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin
IPC分類
H05G2/00; H05H1/24
技術(shù)領(lǐng)域
plasma,reflector,pump,in,assembly,or,gas,optical,pass,broadband
地域： CA CA Milpitas

摘要

A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

說明書

In another embodiment, the individual components 230 and/or 232 may be cooled. For example, the top portion 230 and/or the bottom portion 232 of the reflector assembly 202 may be liquid cooled. For instance, top portion 230 and/or the bottom portion 232 of the reflector assembly 202 may include a liquid flow system (e.g., one or more tubes) for passing a liquid coolant (e.g., water) through the body of the components 230, 232. Further, the liquid flow system may be coupled to an external heat sink, whereby heat is transferred from the top portion 230 and/or the bottom portion 232 of the reflector assembly 202 to the heat sink view the liquid flowing in the flow system.

FIGS. 2G-2H illustrate a reflector assembly 202 equipped with multiple illumination sources 104a-104d, in accordance with one or more embodiments of the present disclosure. FIG. 2G and FIG. 2H illustrates a top view and side view of the reflector assembly 202, respectively. It is noted herein that the use of multiple discrete sources 104a-104d may aid in achieving high NA plasma pumping within the reflector assembly 202.

In one embodiment, the reflector assembly 202 includes a single entrance port 204 for receiving light from the discrete pump sources 104a-104d distributed about the reflector assembly 202.

權(quán)利要求

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