While the embodiment of
In some embodiments, fingerprint sensor also includes temperature sensor 480 which includes circuitry for temperature measurement. In an embodiment, temperature sensor 480 is an integrated silicon thermistor that can be incorporated in the manufacturing process with array 450. In another embodiment, temperature sensor 480 is a MEMS structure different from array 450 but compatible with the manufacturing process for PMUT array 450. In another embodiment, temperature sensor 480 is comprised within a CMOS control layer of the array 450. It should be appreciated that temperature sensor 480 may be any other type of sensor for determining a temperature of ultrasonic sensor 415.