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Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement

專利號(hào)
US11177114B1
公開日期
2021-11-16
申請(qǐng)人
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH（DE Heimstetten）
發(fā)明人
Matthias Firnkes; Florian Lampersberger; Carlo Salvesen
IPC分類
H01J37/00; H01J37/317; H01J37/09; H01J37/244; H01J37/12
技術(shù)領(lǐng)域
electrode,first,spacer,element,shield,contact,blind,conductive,beam,second
地域： Heimstetten

摘要

An electrode arrangement for acting on a charged particle beam in a charged particle beam apparatus is described. The electrode arrangement includes a first electrode with a first opening for the charged particle beam; a first spacer element positioned in a first recess provided in the first electrode on a first electrode side for aligning the first electrode relative to a second electrode, the first spacer element having a first blind hole; a first conductive shield provided in the first blind hole; and a contact assembly protruding from the first electrode into the first blind hole for ensuring an electrical contact between the first electrode and the first conductive shield. Further, a contact assembly for such an electrode arrangement, a charged particle beam device with such an electrode arrangement, as well as a method of reducing an electrical field strength in an electrode arrangement are described.

說(shuō)明書

In some embodiments, the contact assembly 160 further includes a spring element 165 that pushes the first contact element 161 and the second contact element 162 apart from each other in the axial direction A. The first contact element 161 may be pushed into the first blind hole 141 into electrical contact with the first conductive shield 150, and the second contact element 162 may be pushed into the second blind hole 146 into electrical contact with the second conductive shield 151.

In some embodiments, which can be combined with other embodiments described herein, the spring element 165 electrically contacts the first electrode 110 and acts between an axial end or a shoulder of the first contact element 161 and an axial end or a shoulder of the second contact element 162. In the embodiment depicted in FIG. 3A and FIG. 3B, the spring element 165 is arranged between an axial end of the first contact element 161 and a shoulder of the second contact element 162, pushing the first contact element 161 and the second contact element 162 apart in the axial direction A.

權(quán)利要求

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