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Method for dicing integrated fan-out packages without seal rings

專利號
US11177142B2
公開日期
2021-11-16
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Li-Hsien Huang; Yueh-Ting Lin; An-Jhih Su; Ming Shih Yeh; Der-Chyang Yeh
IPC分類
H01L21/56; H01L23/31; H01L25/16; H01L21/683; H01L23/00; H01L25/00
技術(shù)領域
die,dicing,conductive,molding,packages,in,pillars,dielectric,package,structure
地域: Hsinchu

摘要

A method includes attaching a first die and a second die to a carrier; forming a molding material between the first die and second die; and forming a redistribution structure over the first die, the second die and the molding material, the redistribution structure includes a first redistribution region; a second redistribution region; and a dicing region between the first redistribution region and the second redistribution region. The method further includes forming a first opening and a second opening in the dicing region, the first opening and the second opening extending through the redistribution structure and exposing the molding material; and separating the first die and the second die by cutting through a portion of the molding material aligned with the dicing region from a second side of the molding material toward the first side of the molding material, the second side opposing the first side.

說明書

Seal rings generally comprise dummy conductive features, such as metal lines and metal vias that are formed in the redistribution structure (e.g., 140′) around the perimeters of each semiconductor package (e.g., 1100A and 1100B). In other words, in a plan view, each of the seal rings has a ring shape (e.g., a rectangle shape) and encircles a respective semiconductor package (e.g., 1100A, 1100B). The metal lines and metal vias of the seal rings may be formed in the same processing steps and using the same material(s) as the conductive lines (see, e.g., 143 in FIG. 4) and the conductive vias (see, e.g., 145 in FIG. 4) of the redistribution structure 140′. For example, the metal lines and metal vias of the seal rings may be formed in the same dielectric layers that the conductive lines and the conductive vias of the redistribution structure 140′ are formed, except that the metal lines and metal vias of the seal rings are electrically isolated. The seals rings are built to protect, e.g., the redistribution structure of the semiconductor packages from cracking and/or delamination during a subsequent dicing process. For example, when the blade of a dicing saw cuts into the dicing region 300 between two neighboring seal rings, cracks in the redistribution structure 140′, which is caused by the blade, may be stopped by the seal rings and damage to the semiconductor packages may be avoided. Similarly, delamination of the redistribution structure 140, which may otherwise occur due to the dicing, may also be stopped or reduced by the seal rings.

權(quán)利要求

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