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Method for dicing integrated fan-out packages without seal rings

專利號(hào)
US11177142B2
公開日期
2021-11-16
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Li-Hsien Huang; Yueh-Ting Lin; An-Jhih Su; Ming Shih Yeh; Der-Chyang Yeh
IPC分類
H01L21/56; H01L23/31; H01L25/16; H01L21/683; H01L23/00; H01L25/00
技術(shù)領(lǐng)域
die,dicing,conductive,molding,packages,in,pillars,dielectric,package,structure
地域: Hsinchu

摘要

A method includes attaching a first die and a second die to a carrier; forming a molding material between the first die and second die; and forming a redistribution structure over the first die, the second die and the molding material, the redistribution structure includes a first redistribution region; a second redistribution region; and a dicing region between the first redistribution region and the second redistribution region. The method further includes forming a first opening and a second opening in the dicing region, the first opening and the second opening extending through the redistribution structure and exposing the molding material; and separating the first die and the second die by cutting through a portion of the molding material aligned with the dicing region from a second side of the molding material toward the first side of the molding material, the second side opposing the first side.

說明書

In FIG. 7A, two openings 311/313 are formed by the pre-cut process, with each opening providing protection against cracking and/or delamination for an adjacent semiconductor package in a subsequent dicing process, as will be discussed in more details hereinafter with reference to FIG. 10. In particular, the opening 311 protects the redistribution structure of the semiconductor package 1100A, and the opening 313 protects the redistribution structure of the semiconductor package 1100B. Forming more than two openings between two adjacent semiconductor packages may not be necessary, since the additional opening(s), if formed, does not provide much additional protection against cracking and/or delamination of the redistribution structure 140′ during dicing. On the other hand, forming only one opening, e.g., forming only 311 or only 313, may not provide protection for one of the two adjacent semiconductor packages. Although an opening having a wide width, e.g., an opening with a width extending from 311E to 313E, may be formed between two adjacent semiconductor packages to provide protection against cracking and/or delamination, forming such a wide opening may take a significantly longer time, and/or may require laser with much higher output power. Therefore, the two openings (e.g., 311 and 313) formed between two adjacent semiconductor packages by the pre-cut process, combined with the dicing process discussed hereinafter with reference to FIG. 10, provide an efficient (e.g., shorter fabrication time, and higher productivity) and easy-to-implement manufacturing process that does not require seal rings but still provides protection against cracking and delamination.

權(quán)利要求

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