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Method for dicing integrated fan-out packages without seal rings

專利號
US11177142B2
公開日期
2021-11-16
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Li-Hsien Huang; Yueh-Ting Lin; An-Jhih Su; Ming Shih Yeh; Der-Chyang Yeh
IPC分類
H01L21/56; H01L23/31; H01L25/16; H01L21/683; H01L23/00; H01L25/00
技術(shù)領(lǐng)域
die,dicing,conductive,molding,packages,in,pillars,dielectric,package,structure
地域: Hsinchu

摘要

A method includes attaching a first die and a second die to a carrier; forming a molding material between the first die and second die; and forming a redistribution structure over the first die, the second die and the molding material, the redistribution structure includes a first redistribution region; a second redistribution region; and a dicing region between the first redistribution region and the second redistribution region. The method further includes forming a first opening and a second opening in the dicing region, the first opening and the second opening extending through the redistribution structure and exposing the molding material; and separating the first die and the second die by cutting through a portion of the molding material aligned with the dicing region from a second side of the molding material toward the first side of the molding material, the second side opposing the first side.

說明書

As illustrated in FIG. 11, the individual PoP packages 500 has a redistribution structure 140, with the die 120 and the conductive pillars 119 electrically coupled to the upper surface of the redistribution structure 140. The molding material 130 is formed over the redistribution structure 140 around the die 120 and around the conductive pillars 119. In the example of FIG. 11, the molding material 130 extends beyond lateral extents of the redistribution structure 140. In other words, the molding material 130 is wider than, thus not conterminous with, the redistribution structure 140. For example, the molding material 130 may extend laterally beyond the boundaries (e.g., sidewalls) of redistribution structure 140 by a width W5, which may range from about 1 μm to about 810 μm. This is due to the width W3 of the blade 315 being smaller than the width W2 between sidewall 311E and sidewall 313E, in some embodiments.

As illustrated in FIG. 11, an upper portion (e.g., a portion distal the redistribution structure 140) of the molding material 130 has sidewalls 130S1 that extend beyond the lateral extents of the redistribution structure 140. Further, a lower portion (e.g., a portion physically contacting the redistribution structure 140) of the molding material 130 may have sidewalls 130S2 that are aligned with the sidewalls of the redistribution structure 140, e.g., the lower portion of the molding material 130 may have a same width as the redistribution structure 140.

權(quán)利要求

1
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