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Method for dicing integrated fan-out packages without seal rings

專利號(hào)
US11177142B2
公開日期
2021-11-16
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Li-Hsien Huang; Yueh-Ting Lin; An-Jhih Su; Ming Shih Yeh; Der-Chyang Yeh
IPC分類
H01L21/56; H01L23/31; H01L25/16; H01L21/683; H01L23/00; H01L25/00
技術(shù)領(lǐng)域
die,dicing,conductive,molding,packages,in,pillars,dielectric,package,structure
地域: Hsinchu

摘要

A method includes attaching a first die and a second die to a carrier; forming a molding material between the first die and second die; and forming a redistribution structure over the first die, the second die and the molding material, the redistribution structure includes a first redistribution region; a second redistribution region; and a dicing region between the first redistribution region and the second redistribution region. The method further includes forming a first opening and a second opening in the dicing region, the first opening and the second opening extending through the redistribution structure and exposing the molding material; and separating the first die and the second die by cutting through a portion of the molding material aligned with the dicing region from a second side of the molding material toward the first side of the molding material, the second side opposing the first side.

說明書

Variations of the disclosed embodiments are possible and are fully intended to be included within the scope of the present disclosure. For example, the number of dies 120 in each PoP package, the number and/or the location of the conductive pillars 119 in each PoP package may be modified. As another example, the dielectric layer 110 may be completely removed from the PoP package 500. As yet another example, the amount and/or shape of the underfill material 169 may be modified. For example, the underfill material 169 may be a continuous volume of dielectric material that fills the gap between the top package and the bottom package and extends continuously from a first conductive joint 168 to another conductive joint 168. Alternatively, the underfill material 169 may comprise multiple portions that are physically separated from each other, with each portion of the underfill material 169 surrounding a respective conductive joint 168.

Embodiments may achieve advantages. By omitting the seal ring in the redistribution structure, more space is available for forming the semiconductor packages, thereby achieving higher productivity. The disclosed pre-cut process and dicing process avoid or reduce cracking/delamination without the use of seal rings, thus allowing for the gain in the productivity without the problem associated with cracking and delamination.

權(quán)利要求

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