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Method of manufacturing a semiconductor device having redistribution layer including a dielectric layer made from a low-temperature cure polyimide

專利號
US11177165B2
公開日期
2021-11-16
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsin-Chu)
發(fā)明人
Zi-Jheng Liu; Yu-Hsiang Hu; Hung-Jui Kuo
IPC分類
H01L21/768; H01L21/56; H01L23/498; H01L23/525; H01L23/532; H01L23/538; H01L23/31
技術領域
layer,may,in,be,ghi,polyimide,first,vias,thk,as
地域: Hsinchu

摘要

A method of manufacturing a semiconductor device includes the step of positioning a patterned mask over a dielectric layer. The dielectric layer comprises a low-temperature cure polyimide. The method further includes the steps of exposing a first surface of the dielectric layer through the patterned mask to an I-line wavelength within an I-line stepper, and developing the dielectric layer to form an opening.

說明書

Once exposed a removal of the exposed portions of the first seed layer 107 may be performed (not illustrated in FIG. 1 but seen in FIG. 3 below). In an embodiment the exposed portions of the first seed layer 107 (e.g., those portions that are not covered by the vias 111) may be removed by, for example, a wet or dry etching process. For example, in a dry etching process reactants may be directed towards the first seed layer 107 using the vias 111 as masks. In another embodiment, etchants may be sprayed or otherwise put into contact with the first seed layer 107 in order to remove the exposed portions of the first seed layer 107. After the exposed portion of the first seed layer 107 has been etched away, a portion of the polymer layer 105 is exposed between the vias 111.

權利要求

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